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"Impact of TSV location in HVIC on CMOS operation: A mixed-mode TCAD ..."

Mohamed Abouelatta-Ebrahim, Ahmed Shaker, Christian Gontrand (2018)

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DOI: 10.1016/J.MEJO.2018.03.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mohamed Abouelatta-Ebrahim, Ahmed Shaker, Christian Gontrand:
Impact of TSV location in HVIC on CMOS operation: A mixed-mode TCAD simulation study. Microelectron. J. 75: 113-118 (2018)

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