"Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS ..."

Chen-Yang Lin, Cheng-Chih Hsu, Ching-Liang Dai (2015)

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DOI: 10.3390/MI6111447

access: open

type: Journal Article

metadata version: 2022-10-02

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  - https://dblp.org/rec/journals/micromachines/LinHD15
Chen-Yang Lin, Cheng-Chih Hsu, Ching-Liang Dai:
Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology. Micromachines 6(11): 1645-1654 (2015)

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