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"Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS ..."
Han Du, Fook Siong Chau, Guangya Zhou (2016)
- Han Du
, Fook Siong Chau, Guangya Zhou:
Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators. Micromachines 7(4): 69 (2016)
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