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"A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate ..."

Arthur Campos de Oliveira et al. (2022)

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DOI: 10.1109/JSSC.2022.3210003

access: closed

type: Journal Article

metadata version: 2022-12-05

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Arthur Campos de Oliveira, Sining Pan, Remco J. Wiegerink, Kofi A. A. Makinwa:
A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing. IEEE J. Solid State Circuits 57(12): 3681-3692 (2022)

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