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"Single-chip surface micromachined integrated gyroscope with 50°/h ..."

John A. Geen et al. (2002)

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DOI: 10.1109/JSSC.2002.804345

access: closed

type: Journal Article

metadata version: 2022-04-06

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John A. Geen, Steven J. Sherman, John F. Chang, Stephen R. Lewis:
Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation. IEEE J. Solid State Circuits 37(12): 1860-1866 (2002)

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