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"A 22-ng/ $\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically ..."
Yuki Furubayashi et al. (2020)
- Yuki Furubayashi
, Takashi Oshima
, Taizo Yamawaki, Keiki Watanabe, Keijiro Mori, Naoki Mori, Akira Matsumoto, Yudai Kamada
, Atsushi Isobe
, Tomonori Sekiguchi
:
A 22-ng/ $\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques. IEEE J. Solid State Circuits 55(9): 2539-2552 (2020)
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