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"CMOS monolithic mechatronic microsystem for surface imaging and force ..."

Diego Barrettino et al. (2005)

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DOI: 10.1109/JSSC.2004.842868

access: closed

type: Journal Article

metadata version: 2024-05-07

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Diego Barrettino, Sadik Hafizovic, Tormod Volden, Jan Sedivý, Kay-Uwe Kirstein, Andreas Hierlemann:
CMOS monolithic mechatronic microsystem for surface imaging and force response studies. IEEE J. Solid State Circuits 40(4): 951-959 (2005)

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