"Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical ..."

Yasufumi Enami (2017)

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DOI: 10.1155/2017/4198485

access: open

type: Journal Article

metadata version: 2019-06-02

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Yasufumi Enami:
Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications. J. Sensors 2017: 4198485:1-4198485:6 (2017)

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