"Evaluation of Thin Film Material for Micromechanisms."

Osamu Tabata, Susumu Sugiyama (1991)

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DOI: 10.20965/JRM.1991.P0008

access: closed

type: Journal Article

metadata version: 2020-04-01

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Osamu Tabata, Susumu Sugiyama:
Evaluation of Thin Film Material for Micromechanisms. J. Robotics Mechatronics 3(1): 8-11 (1991)

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