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"Material removal rate prediction in chemical mechanical planarization with ..."

Yupeng Wei, Dazhong Wu (2024)

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DOI: 10.1007/S10845-022-02040-W

access: closed

type: Journal Article

metadata version: 2024-02-05

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Yupeng Wei, Dazhong Wu:
Material removal rate prediction in chemical mechanical planarization with conditional probabilistic autoencoder and stacking ensemble learning. J. Intell. Manuf. 35(1): 115-127 (2024)

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