"Modeling and optimization of thermal-flow lithography process using a ..."

Te-Sheng Li, Szu-Hung Chen (2011)

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DOI: 10.1007/S10845-009-0271-0

access: closed

type: Journal Article

metadata version: 2020-09-24

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Te-Sheng Li, Szu-Hung Chen:
Modeling and optimization of thermal-flow lithography process using a neural-genetic approach. J. Intell. Manuf. 22(2): 191-200 (2011)

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