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ORCID"Feasibility study of modular plant for 300 mm-IC fabrications."
Suhua Hsieh, Chung-Rung Hung (2004)
- Suhua Hsieh, Chung-Rung Hung:
Feasibility study of modular plant for 300 mm-IC fabrications. J. Intell. Manuf. 15(2): 233-244 (2004)
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