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"Wafer defect inspection by neural analysis of region features."

Chuan-Yu Chang et al. (2011)

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DOI: 10.1007/S10845-009-0369-4

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - https://dblp.org/rec/journals/jim/ChangLCJ11
Chuan-Yu Chang, ChunHsi Li, Yung-Chi Chang, MuDer Jeng:
Wafer defect inspection by neural analysis of region features. J. Intell. Manuf. 22(6): 953-964 (2011)

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