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"A green scheduling model for two-stage photo-etching and acid-etching ..."

Min Kong et al. (2024)

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DOI: 10.1016/J.JII.2024.100655

access: closed

type: Journal Article

metadata version: 2024-07-14

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Min Kong, Yajing Zhang, Jin Xu, Weizhong Wang, Shaojun Lu, Amir M. Fathollahi Fard:
A green scheduling model for two-stage photo-etching and acid-etching collaboration in semiconductor manufacturing. J. Ind. Inf. Integr. 41: 100655 (2024)

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