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"Deposition of ZnO Films for FBAR Device Fabrication."

Hae-il Song et al. (2005)

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DOI: —

access: open

type: Journal Article

metadata version: 2021-02-16

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  - electronic edition @ or.kr (open access)
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  dblp key:
  - journals/jicce/SongMYY05
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  persistent URL:
  - https://dblp.org/rec/journals/jicce/SongMYY05
Hae-il Song, Linh Mai, Mun-Hyuk Yim, Giwan Yoon:
Deposition of ZnO Films for FBAR Device Fabrication. J. Inform. and Commun. Convergence Engineering 3(3): 131-136 (2005)

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