"Adaptive iterative extended state observer-based data-driven iterative ..."

Jun-Chao Ren, Ding Liu, Yin Wan (2023)

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DOI: 10.1016/J.JFRANKLIN.2023.01.035

access: closed

type: Journal Article

metadata version: 2023-03-28

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Jun-Chao Ren, Ding Liu, Yin Wan:
Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process. J. Frankl. Inst. 360(4): 3119-3136 (2023)

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