"Real-time critical dimension measurement of thin film transistor liquid ..."

Sung-Hoon Park et al. (2014)

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DOI: 10.1117/1.JEI.23.1.013001

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type: Journal Article

metadata version: 2017-05-28

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Sung-Hoon Park, Tai-Wook Kim, Jeong-Ho Lee, Heui-Jae Pahk:
Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography. J. Electronic Imaging 23(1): 013001 (2014)

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