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"Level-set strategy for inverse DSA-lithography."

Gaddiel Ouaknin et al. (2018)

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DOI: 10.1016/J.JCP.2018.09.021

access: closed

type: Journal Article

metadata version: 2022-10-02

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  - journals/jcphy/OuakninLDFG18
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  - https://dblp.org/rec/journals/jcphy/OuakninLDFG18
Gaddiel Ouaknin, Nabil Laachi, Kris T. Delaney, Glenn H. Fredrickson, Frédéric Gibou:
Level-set strategy for inverse DSA-lithography. J. Comput. Phys. 375: 1159-1178 (2018)

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