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"Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices ..."

Cheng Bai, Jin Huang (2014)

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DOI: 10.1155/2014/192891

access: open

type: Journal Article

metadata version: 2020-07-16

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Cheng Bai, Jin Huang:
Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect. J. Appl. Math. 2014: 192891:1-192891:7 (2014)

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