"Optimizing semiconductor process recipe settings using hybrid ..."

Zhen-Yin Annie Chen, Chun-Cheng Lin, Ke-Wen Lu (2025)

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DOI: 10.1016/J.INS.2025.121998

access: closed

type: Journal Article

metadata version: 2025-04-01

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Zhen-Yin Annie Chen, Chun-Cheng Lin, Ke-Wen Lu:
Optimizing semiconductor process recipe settings using hybrid meta-learning and metaheuristic approaches. Inf. Sci. 706: 121998 (2025)

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