"Wafer prealigning robot based on shape center calculation."

Zhuang Fu et al. (2008)

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DOI: 10.1108/01439910810909538

access: closed

type: Journal Article

metadata version: 2022-03-11

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Zhuang Fu, C. X. Huang, R. Q. Liu, Y. Z. Zhao, Q. X. Cao:
Wafer prealigning robot based on shape center calculation. Ind. Robot 35(6): 536-540 (2008)

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