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"Feature Vectors Based on Wire Width and Distance for Lithography Hotspot ..."

Gaku Kataoka et al. (2023)

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DOI: 10.2197/IPSJTSLDM.16.2

access: closed

type: Journal Article

metadata version: 2023-03-07

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Gaku Kataoka, Masahiro Yamamoto, Masato Inagi, Shinobu Nagayama, Shin'ichi Wakabayashi:
Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection. IPSJ Trans. Syst. LSI Des. Methodol. 16: 2-11 (2023)

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