"The study of TSV-induced and strained silicon-enhanced stress in 3D-ICs."

Jindong Zhou et al. (2023)

Details and statistics

DOI: 10.1016/J.VLSI.2022.09.017

access: closed

type: Journal Article

metadata version: 2022-12-25

a service of  Schloss Dagstuhl - Leibniz Center for Informatics