"Fast and scalable parallel layout decomposition in double patterning ..."

Wei Zhao et al. (2014)

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DOI: 10.1016/J.VLSI.2013.09.002

access: closed

type: Journal Article

metadata version: 2020-02-20

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Wei Zhao, Hailong Yao, Yici Cai, Subarna Sinha, Charles C. Chiang:
Fast and scalable parallel layout decomposition in double patterning lithography. Integr. 47(2): 175-183 (2014)

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