"Efficient fracturing of all angle shaped VLSI mask pattern data."

Georg Pelz, Volker Meyer zu Bexten (1991)

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DOI: 10.1016/S0167-9260(06)80012-X

access: closed

type: Journal Article

metadata version: 2020-02-20

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Georg Pelz, Volker Meyer zu Bexten:
Efficient fracturing of all angle shaped VLSI mask pattern data. Integr. 10(2): 143-154 (1991)

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