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"A contribution towards model-based design of application-specific MEMS."

Jenny Klaus et al. (2017)

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DOI: 10.1016/J.VLSI.2017.03.014

access: closed

type: Journal Article

metadata version: 2020-02-20

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Jenny Klaus, Eric Schaefer, Roman Paris, Astrid Frank, Ralf Sommer:
A contribution towards model-based design of application-specific MEMS. Integr. 58: 454-462 (2017)

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