"Effects of Source and Drain Impurity Profile on Breakdown Voltage of ..."

Shinzo Tsuboi et al. (2008)

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DOI: 10.11185/IMT.3.1

access: closed

type: Journal Article

metadata version: 2024-08-28

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Shinzo Tsuboi, Genshiro Kawachi, Masahiro Mitani, Takashi Okada:
Effects of Source and Drain Impurity Profile on Breakdown Voltage of High-Performance Si TFTs. Inf. Media Technol. 3(1): 1-6 (2008)

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