"Implementing virtual metrology for in-line quality control in ..."

Jason Chao-Hsien Pan, Damon H. E. Tai (2009)

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DOI: 10.1080/00207720802645204

access: closed

type: Journal Article

metadata version: 2020-07-22

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Jason Chao-Hsien Pan, Damon H. E. Tai:
Implementing virtual metrology for in-line quality control in semiconductor manufacturing. Int. J. Syst. Sci. 40(5): 461-470 (2009)

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