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"Quantitative assessment of subsurface damage depth in silicon wafers based ..."

J. M. Zhang, J. G. Sun (2005)

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DOI: 10.1504/IJMTM.2005.007702

access: closed

type: Journal Article

metadata version: 2020-06-04

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J. M. Zhang, J. G. Sun:
Quantitative assessment of subsurface damage depth in silicon wafers based on optical transmission properties. Int. J. Manuf. Technol. Manag. 7(5/6): 540-552 (2005)

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