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"Process specification language for management of MEMS device development - ..."

Tetsuhei Nakashima-Paniagua, John Doucette, Walied A. Moussa (2016)

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DOI: 10.1504/IJMTM.2016.10000021

access: closed

type: Journal Article

metadata version: 2020-06-04

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Tetsuhei Nakashima-Paniagua, John Doucette, Walied A. Moussa:
Process specification language for management of MEMS device development - a step towards standardisation. Int. J. Manuf. Technol. Manag. 30(3/4): 143-163 (2016)

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