default search action
"A comprehensive mathematical model to calculate polish time for oxide ..."
S. Kumar, T. K. Garg, V. P. Wani (2011)
- S. Kumar, T. K. Garg, V. P. Wani:
A comprehensive mathematical model to calculate polish time for oxide chemical mechanical process (CMP). Int. J. Manuf. Technol. Manag. 22(2): 145-159 (2011)
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.