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"Micromachining of silicon with excimer laser in air and water medium."
Alok Kumar Das, Partha Saha (2010)
- Alok Kumar Das, Partha Saha:
Micromachining of silicon with excimer laser in air and water medium. Int. J. Manuf. Technol. Manag. 21(1/2): 42-53 (2010)
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