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"Hybrid bulk micro-machining process suitable for roughness reduction in ..."

Arvind Chandrasekaran et al. (2006)

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DOI: 10.1504/IJMTM.2006.009992

access: closed

type: Journal Article

metadata version: 2020-06-04

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  - https://dblp.org/rec/journals/ijmtm/ChandrasekaranPSD06
Arvind Chandrasekaran, Muthukumaran Packirisamy, Ion Stiharu, Andre Delage:
Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices. Int. J. Manuf. Technol. Manag. 9(1/2): 144-159 (2006)

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