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"Bulk micromachining for SOI based microsystems using double side ..."

Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat (2008)

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DOI: 10.1504/IJMTM.2008.016778

access: closed

type: Journal Article

metadata version: 2020-06-04

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  - https://dblp.org/rec/journals/ijmtm/BhaskarPB08
Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat:
Bulk micromachining for SOI based microsystems using double side XeF₂ etching. Int. J. Manuf. Technol. Manag. 13(2/3/4): 297-307 (2008)

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