"Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall ..."

Hui Chen et al. (2013)

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DOI: 10.4018/IJIMR.2013010102

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type: Journal Article

metadata version: 2024-02-12

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Hui Chen, Manu Pallapa, Weijie Sun, Zhendong Sun, John T. W. Yeow:
Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall Electrodes. Int. J. Intell. Mechatronics Robotics 3(1): 16-26 (2013)

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