"3d Structures Formation In A Single Layer Su-8 Car Using Dual Uv And ..."

V. A. Kudryashov et al. (2003)

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DOI: 10.1142/S1465876303002131

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type: Journal Article

metadata version: 2020-07-09

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V. A. Kudryashov, X.-C. Yuan, T. L. Tan, P. Lee, S. F. A. Karim, B. L. Tan:
3d Structures Formation In A Single Layer Su-8 Car Using Dual Uv And Electron-Beam Lithography. Int. J. Comput. Eng. Sci. 4(3): 719-723 (2003)

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