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"Low Temperature Silicon Wafer Bonding By Sol-Gel Processing."
S. S. Deng et al. (2003)
- S. S. Deng, Jun Wei, Cher Ming Tan, M. L. Nai, W. B. Yu, H. Xie:
Low Temperature Silicon Wafer Bonding By Sol-Gel Processing. Int. J. Comput. Eng. Sci. 4(3): 655-658 (2003)
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