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"Design Optimization, Fabrication And Testing Of A Capacitive Silicon ..."
K. N. Bhat et al. (2003)
- K. N. Bhat, B. R. K. Reddy, V. Vinoth Kumar, K. Siva Kumar, Y. Sushma, N. Ramesh Babu, K. Natarajan:
Design Optimization, Fabrication And Testing Of A Capacitive Silicon Accelerometer Using An Soi Approach. Int. J. Comput. Eng. Sci. 4(3): 485-488 (2003)
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