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"Cycle time analysis for wafer revisiting process in scheduling of ..."

Yuxi Sun, Naiqi Wu (2011)

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DOI: 10.1007/S11633-011-0601-5

access: closed

type: Journal Article

metadata version: 2022-02-07

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Yuxi Sun, Naiqi Wu:
Cycle time analysis for wafer revisiting process in scheduling of single-arm cluster tools. Int. J. Autom. Comput. 8(4): 437-444 (2011)

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