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"Mirror Surface Finishing of Silicon Wafer Edge Using Ultrasonic Assisted ..."

Yongbo Wu et al. (2013)

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DOI: 10.20965/IJAT.2013.P0663

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijat/WuYFZ13
Yongbo Wu, Weiping Yang, Masakazu Fujimoto, Libo Zhou:
Mirror Surface Finishing of Silicon Wafer Edge Using Ultrasonic Assisted Fixed-Abrasive CMP (UF-CMP). Int. J. Autom. Technol. 7(6): 663-670 (2013)

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