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"On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by ..."

Jiucheng Wu et al. (2024)

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DOI: 10.20965/IJAT.2024.P0004

access: closed

type: Journal Article

metadata version: 2024-07-03

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Jiucheng Wu, Yifan Hong, Dong Wook Shin, Ryo Sato, Lue Quan, Hiraku Matsukuma, Wei Gao:
On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by Using a Differential Angle Sensor. Int. J. Autom. Technol. 18(1): 4-10 (2024)

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