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"Development of a Sharp-Tipped L-Shaped Stylus for Measurement of Nanoscale ..."

Kosuke Uchiyama et al. (2022)

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DOI: 10.20965/IJAT.2022.P0489

access: closed

type: Journal Article

metadata version: 2022-07-24

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  - https://dblp.org/rec/journals/ijat/UchiyamaMKS22
Kosuke Uchiyama, Hiroshi Murakami, Akio Katsuki, Takao Sajima:
Development of a Sharp-Tipped L-Shaped Stylus for Measurement of Nanoscale Sidewall Features. Int. J. Autom. Technol. 16(4): 489-496 (2022)

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