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"Improvement of Transfer Durability of a Pillar-Shaped Release-Agent-Free ..."

Junpei Tsuchiya et al. (2018)

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DOI: 10.20965/IJAT.2018.P0723

access: closed

type: Journal Article

metadata version: 2020-07-09

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Junpei Tsuchiya, Gen Nakagawa, Shin Hiwasa, Jun Taniguchi:
Improvement of Transfer Durability of a Pillar-Shaped Release-Agent-Free Replica Mold in Ultraviolet Nanoimprint Lithography. Int. J. Autom. Technol. 12(5): 723-729 (2018)

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