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"Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly ..."

Yuki Taoka et al. (2022)

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DOI: 10.20965/IJAT.2022.P0471

access: closed

type: Journal Article

metadata version: 2023-09-30

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Yuki Taoka, Kohei Kawabata, Pasomphone Hemthavy, Seungman Choi, Kunio Takahashi, Shigeki Saito:
Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography. Int. J. Autom. Technol. 16(4): 471-477 (2022)

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