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"Scanning Type Microprobe for Displacement Measurement Based on Standing ..."

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi (2011)

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DOI: 10.20965/IJAT.2011.P0395

access: closed

type: Journal Article

metadata version: 2020-07-09

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Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi:
Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle. Int. J. Autom. Technol. 5(3): 395-402 (2011)

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