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"Software Datum Design for Cross-Axis Motion Measurement of X-Stage Based ..."

Eiki Okuyama, Hiroshi Takahashi, Hiromi Ishikawa (2011)

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DOI: 10.20965/IJAT.2011.P0097

access: closed

type: Journal Article

metadata version: 2020-07-09

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Eiki Okuyama, Hiroshi Takahashi, Hiromi Ishikawa:
Software Datum Design for Cross-Axis Motion Measurement of X-Stage Based on Least Uncertainty Criterion. Int. J. Autom. Technol. 5(2): 97-101 (2011)

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