"MEMS Sensor Devices with a Piezo-Resistive Cantilever."

Kiyoshi Matsumoto, Isao Shimoyama (2018)

> Home

Details and statistics

DOI: 10.20965/IJAT.2018.P0004

access: closed

type: Journal Article

metadata version: 2020-09-05

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/ijat/MatsumotoS18
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/ijat/MatsumotoS18
Kiyoshi Matsumoto, Isao Shimoyama:
MEMS Sensor Devices with a Piezo-Resistive Cantilever. Int. J. Autom. Technol. 12(1): 4-14 (2018)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.