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"An Electrostatic Force Probe for Surface Profile Measurement in Noncontact ..."

So Ito et al. (2013)

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DOI: 10.20965/IJAT.2013.P0714

access: closed

type: Journal Article

metadata version: 2024-07-03

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  - https://dblp.org/rec/journals/ijat/ItoJGHSHG13
So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He, Wei Gao:
An Electrostatic Force Probe for Surface Profile Measurement in Noncontact Condition. Int. J. Autom. Technol. 7(6): 714-719 (2013)

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