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"Optimization of Double-Sided Polishing Conditions to Achieve High ..."

Kenji Hirose, Toshiyuki Enomoto (2009)

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DOI: 10.20965/IJAT.2009.P0581

access: closed

type: Journal Article

metadata version: 2020-07-09

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Kenji Hirose, Toshiyuki Enomoto:
Optimization of Double-Sided Polishing Conditions to Achieve High Flatness: Consideration of Relative Motion Direction. Int. J. Autom. Technol. 3(5): 581-591 (2009)

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