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"A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using ..."

Terutake Hayashi, Toshiki Seri, Syuhei Kurokawa (2017)

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DOI: 10.20965/IJAT.2017.P0754

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - journals/ijat/HayashiSK17
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  - https://dblp.org/rec/journals/ijat/HayashiSK17
Terutake Hayashi, Toshiki Seri, Syuhei Kurokawa:
A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe. Int. J. Autom. Technol. 11(5): 754-760 (2017)

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